DIAMETER CONTROL IN CZOCHRALSKI CRYSTAL GROWTH.

摘要

It is to pass through weighing means (9) in a furnace (2) by the weight of heat sensor (11) and residual melting object by measuring the temperature of two melts that crystal in diameter control Grown by CZ Method, which gradually completes,. The weight measurement data is given to microprocessor (11) with control algolithm. Microprocessor and temperature measurement output are fed to the temperature that three temperature controllers (13) adjust melt, to control the crystal of Automatic Diameter.