MOLECULAR BEAM EPITAXIAL DEPOSITION DEVICE FOR FORMING PERIODIC STRUCTURE OF SINGLE CRYSTAL THIN FILM

摘要

PURPOSE:To prevent the deterioration of electrical characteristics and periodicity of the periodic structure of a single crystal thin film resulting from the opening and closing of a cell shutter by providing a partition plate in a growth chamber, separating the chamber into plural partitions, and furnishing plural rotatable substrate holders. CONSTITUTION:Plural substrate holders 11 having its center on the circumference are arranged in a growth chamber 1 with a rotary shaft 10 as the center. The first regular square partition plate 12 furnished with notches (a) and (b) in the suitable form is provided parallel to the holder 11 in the proximity of a substrate 16. And one second partition plate 13 vertical to the partition plate 12 is provided in the radial direction of a circle on which the holders 11 are arranged to form partitions A and B. Cells 14 and 15 contg. semiconductor materials 18 and 19 are provided in the partitions A and B.