PROCESS FOR FABRICATING INTEGRATED OPTICAL DEVICES ON LITHIUM NIOBATE

摘要

A process for producing optical integrated circuits on lithium niobate substrates in which the composition of the lithium niobate substrates is adjusted by a powder bed equilibration procedure. This procedure involved exposure of the lithium niobate crystals to a powder bed in a crucible during a heat treatment. A similar procedure is used during production of optical integrated circuits to maintain the desired Li/Nb composition in the substrate.