PROCESS FOR FABRICATING INTEGRATED OPTICAL DEVICES ON LITHIUM NIOBATE

摘要

Process for the production of optical integrated circuits on lithium niobate substrates, in which the composition of the lithium niobate substrates is adjusted by a powder bed balancing process. This process involves exposing the lithium niobate crystals to a powdery bed in a crucible during heat treatment. A similar process is used during the production of optical integrated circuits to maintain the desired Li / Nb ratio in the substrate.