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Method of producing a semiconductor device for the integrated injection logic, and semiconductor device so manufactured
Method of producing a semiconductor device for the integrated injection logic, and semiconductor device so manufactured
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机译:制造用于集成注入逻辑的半导体器件的方法以及如此制造的半导体器件
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摘要
An integrated injection logic (I.sup.2 L) semiconductor structure is disclosed which may be advantageously implemented in a group III-V compound semiconductor such as gallium arsenide. The base region of the lateral transistor is made extremely thin (less than one-tenth micron) by use of "regrowth" techniques. The structure of the vertical transistor is simplified by using a Schottky collector.
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