PIEZOELECTRIC PRESSURE SENSING APPARATUS FOR INTEGRATED CIRCUIT TESTING STATIONS

摘要

- 12 -PIEZOELECTRIC PRESSURE SENSING APPARATUSFOR INTEGRATED CIRCUIT TESTING STATIONSABSTRACT OF THE DISCLOSUREA pressure sensing apparatus for use in anintegrated circuit testing station is disclosed. Thetesting station includes a probe, a support structure,and lift means for moving an integrated circuit upwardtoward the probe. The invention specifically consistsof a pressure pad secured to the support structuredirectly above the probe. The pad includes aresilient body portion having a rigid tip. Embeddedwithin the pad is a piezoelectric element havingelectrical contact leads attached thereto. When thetesting station is used, an integrated circuit ismoved upward by the lift means toward the probe. Asthe circuit contacts the probe, it moves the probeupward. As the probe moves upward, it pushes on thepad, causing internal pressures to be generatedtherein. Such pressures are transmitted to thepiezoelectric element which generates electricalimpulses proportional to the pressures exerted on thepad.