Method and device for submicron precision pattern generation

摘要

A method and device for creating patterns on a wide variety of substrates. The dimensions are variable in a wide range, from sub- microscopic and upwards. The device can also be used for microsurgery type manipulations in genetic engineering: a variety of substances can be introduced into biological cells. The production of patterns is based on the guidance of the radiation, electron beam etc. via a tube having a small-diameter tapered end which is metal-coated, and which can be brought to very close proximity of the substrate.