Monolithic electro-acoustic device having an acoustic charge transport device integrated with a transistor

摘要

A novel heterojunction acoustic charge transport device (HACT) includes a modulation doped field effect transistor (MODFET) on the same substrate. The device is characterized by a sequence of epitaxial layers such that the MODFET is fabricated in a first portion of the uppermost layers while the HACT device is fabricated in an adjacent second portion using a partially overlapping subset of the lower layers after selected upper ones have been removed to form a single integrated electro-acoustic device.