首页> 外国专利> POSITIVE PICTURE-EFFECT PHOTOREGIST COMPOUND

POSITIVE PICTURE-EFFECT PHOTOREGIST COMPOUND

机译:积极效果的光复配化合物

摘要

A positive-acting photoresist composition comprising: (i) an alkali-soluble binder comprising a plurality of phenol groups, (ii) an iodonium salt of the general formula: CHEM in which; Ar1 and Ar2 independently represent aromatic or heteroaromatic groups comprising of up to 10 ring atoms, which groups may optionally be linked together to include the iodine atom within a ring structure and, X(-) is an anion such that HX is an acid of pKa not greater than 3, and, (iii) an acid cleavable compound having a nucleus of general formula (I): CHEM in which; n is 0, 1, 2 or 3, each R1, R2 and R3 independently represents hydrogen or an alkyl group comprising up to 4 carbon atoms, R4 and R5 independently represent hydrogen or one or more ring substituents selected from Cl, Br, F, alkyl groups comprising up to 4 carbon atoms, alkoxy groups comprising up to 4 carbon atoms and combinations thereof, and A represents a bond or a divalent linking group containing up to 10 atoms other than hydrogen. The compositions of the invention are intended primarily for use in the preparation of lithographic printing plates, although they may also be used on positive photo-resists for the preparation of metal clad printed circuit boards and other integrated circuitry, proofing sheets etc.
机译:一种正性光致抗蚀剂组合物,其包含:(i)包含多个酚基的碱溶性粘合剂,(ii)通式为:的碘鎓盐,其中; Ar 1和Ar 2独立地表示包含至多10个环原子的芳族或杂芳族基团,该基团可以任选地连接在一起以在环结构内包括碘原子,并且X(-)是阴离子使得HX为pKa不大于3的酸,以及(iii)具有通式(I)的核的酸可裂解的化合物: n为0、1、2或3,每个R 1,R 2和R 3独立地表示氢或包含至多4个碳原子的烷基,R 4和R 5独立地表示氢或一个或多个选自Cl,Br,F的环取代基,包含至多4个碳原子的烷基,包含至多4个碳原子的烷氧基及其组合,并且A表示包含至多10个碳原子的键或二价连接基团氢以外的原子。本发明的组合物主要旨在用于平版印刷版的制备,尽管它们也可以用于正性光刻胶上以制备金属包覆的印刷电路板和其他集成电路,校样板等。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号