OPTICAL APPARATUS HAVING EQUAL-FOCAL-POINT OPTICAL PATH FOR INSPECTING SUBTANCE UNDER INSPECTION IN THREE DIMENSIONS

摘要

PURPOSE: To shorten time required for three-dimensionally inspecting of a body to be inspected. CONSTITUTION: This device for three-dimensionally inspecting the body to be inspected is provided with an irradiation raster 12, a detector raster 17, composed of numerous mutually unrelated detectors for which center point interval forms a detector raster dimension and an optical element for image-forming the irradiation raster 12 on a focus surface and image-forming the focus surface to the detector raster 17. Then, the irradiation raster 12 simultaneously generates numerous separated light spots or shadow zones, for which the center point interval forms an irradiation raster dimension on the focus surface 13f, the image formation of the irradiation raster dimension on the surface of the detector raster 17 is larger than the detector raster dimension or the detector raster dimension is larger than the diameter or side length of the photosensitive surface of respective detector elements.