DEVICE FOR SCANNING ELECTRON MICROSCOPE STAGE INCLINATION

摘要

the invention u043eu0442u043du043eu0441u0438u0442u0441u00a0 technology electronic microscopy, in particular to devices u0434u043bu00a0 tilting tables objects in raster electronic u043cu0438u043au0440u043eu0441u043au043eu043fu0430u0445. to improve the accuracy of u0438u0437u043eu0431u0440u0435u0442u0435u043du0438u00a0 u00a0u0432u043bu00a0u0435u0442u0441u00a0 u043fu043eu0437u0438u0446u0438u043eu043du0438u0440u043eu0432u0430u043du0438u00a0 table by u0438u0441u043au043bu044eu0447u0435u043du0438u00a0 u0432u043bu0438u00a0u043du0438u00a0 elastic deformation of its constituent elements.u0434u043bu00a0 in device of transmission u0432u0440u0430u0449u0435u043du0438u00a0 holder which incorporates a table, a u0434u0432u0443u043cu00a0 plates of a material with u0442u0435u0440u043cu043eu043cu0435u0445u0430u043du0438u0447u0435u0441u043au043eu0439 u043fu0430u043cu00a0u0442u044cu044e, cat u043eu0440u044bu0435 symmetrically installed inside u0441u043eu043eu0441u043du044bu0445 sleeves mounted on ends of the arm. one of the plates has a u043du0430u0433u0440u0435u0442u043eu043c u0441u043eu0441u0442u043eu00a0u043du0438u0438 u0441u043au0440u0443u0447u0435u043du043du0443u044e along the axis of the form u0434u0440u0443u0433u0430u00a0 - a flat shape.the internal ends of the plates are placed in the u043du0430u043fu0440u0430u0432u043bu00a0u044eu0449u0438u0445 u043fu0430u0437u0430u0445 brackets u0441u043au043eu043bu044cu0437u00a0u0449u0435u0439 landing and external connected with u0442u0435u0440u043cu043eu0431u0430u0442u0430u0440u0435u00a0u043cu0438. in heating a wafer u0440u0430u0437u0432u0438u0432u0430u0435u043cu043eu0435 its phase transition force rolls or takes another cold plate only in the field of plastic u0434u0435u0444u043eu0440u043c stock. 2).