Sintered silicon carbide prod. - made by molten silicon infiltration into pressed or moulded elementary carbon@ part

摘要

Sintered silicon carbide prod. prodn. involves infiltrating molten silicon into a pressed or moulded part contg. at least 9 wt.% elementary carbon at 1450-2500 deg.C in an inert atmos. under reduced pressure, the Lc(002) value (i.e. domain length perpendicular to the C (002) surface of the elementary carbon) being up to 100 nm. Also claimed are (i) a sintered silicon carbide product which has been produced by a process involving infiltration of molten silicon into a pressed or moulded part of elementary carbon having an Lc (002) value of up to 100 nm; and (ii) sintered silicon carbide product which contains silicon carbide, silicon and up to 1 wt.% (based on sum of SiC + Si) of elementary carbon and which has been produced by a process involving infiltration of molten silicon into a pressed or moulded part of elementary carbon. USE/ADVANTAGE - The prod. is useful as a shelf for hodling ceramic materials in a rapid firing kiln or as a central tube in a furnace for firing semiconductors. It has good thermal cycling resistance and oxidn. resistance