Additive elements are added to Fe-N soft magnetic thin films along with oxygen, so that the thermal stability is remarkably improved. After annealing treatment at approximately 550° C., it is possible to provide an Fe-N soft magnetic thin film with a low coercive force. Similarly, it is also possible to provide a soft magnetic thin film having a low coercive force by introducing a combination of specific types of additive elements to Fe-N soft magnetic thin films. When oxygen is further added to the film, it is also possible to provide a soft magnetic thin film which has very excellent soft magnetic characteristics and good thermal stability. The soft magnetic thin films of the invention have good soft magnetic characteristics, a high saturation magnetic flux density and good thermal stability. A magnetic head of a metal-in-gap type using the soft magnetic thin film is also described.
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