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Organometallic precursors in conjunction with rapid thermal annealing for synthesis of thin film ceramics
Organometallic precursors in conjunction with rapid thermal annealing for synthesis of thin film ceramics
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机译:有机金属前体与快速热退火相结合,用于合成薄膜陶瓷
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摘要
An organometallic precursor mixture is formed containing desired components of a final ceramic. This precursor mixture is dissolved in an organic solvent. The dissolved mixture is then spin cast or otherwise evenly deposited onto a wafer substrate. Finally, the coated wafer substrate is annealed by a process of Rapid Thermal Annealing to produce a thin ceramic film and to remove any organic material. This process exhibits preferential crystal growth to produce a uniform thin film.
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