METHOD AND APPARATUS FOR DIVIDING SEMICONDUCTOR BAR INTO SEMICONDUCTOR DISKS HAVING ONE SURFACE WITH EXTREME FLATNESS AND SURFACE PROPERTIES AS GOOD AS POSSIBLE

摘要

PURPOSE: To provide a method and apparatus for dividing a semiconductor bar into semiconductor disks having one surface with extreme flatness and surface properties as good as possible. ;CONSTITUTION: A dresser 5 for roughing grinder 2 is operated so that the axial dislocation of the end faces of a finishing grinder 3 and the roughing grinder 2 is kept accurately in a predetermined value. And, a pot-form grinding tool consists of two mutually concentric pot-form grinders with metallic combining structure, where the outer electrolytic dressing grinder 3 containing fine particles has an electrolytic dresser 6 for forming workpiece surface as fine as possible, and the inner roughing grinder 2 containing coarse particles has an electrolytic dresser 5 for obtaining a predetermined axial dislocation of the end faces of both grinding tools.;COPYRIGHT: (C)1993,JPO