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INSTALLATION FOR THE STUDY OR TRANSFORMATION OF SAMPLE SURFACES IN A VACUUM OR CONTROLLED ATMOSPHERE

机译:安装用于研究真空或受控气氛中的样品表面或将其转化

摘要

The present invention relates to an installation for studying the surface of samples placed in a vacuum or in a controlled atmosphere, of the type comprising a main enclosure in which a support plate is placed for at least one device, called SXM, intended for microscopy, spectroscopy or etching of the surface of samples, according to a method implementing a scanning of said surface by a tip that conducts electricity or light, said installation being characterized in that the stage support can be disengaged from the main enclosure and turned on itself around a central axis to allow the use of a set of SXM devices arranged at the periphery of said plate. It applies in particular to microscopy and / or spectroscopy with an electronic tunnel effect, in particular in the ultra-vacuum, to microscopy and / or spectroscopy with an optical tunnel effect, or else to the etching of nanometric structures by optical microlithographic processes. and / or electronic.
机译:本发明涉及一种用于研究放置在真空或受控气氛中的样品表面的设备,该设备包括主外壳,在主外壳中放置用于至少一个用于显微镜的称为SXM的装置的支撑板,光谱或样品表面的蚀刻,是根据通过导电或光的尖端对所述表面进行扫描的方法进行的,所述装置的特征在于,载物台支撑架可从主外壳上脱开并围绕导板自身打开中心轴以允许使用一组布置在所述板的外围的SXM设备。它尤其适用于具有电子隧道效应的显微镜和/或光谱学,尤其是在超真空中,适用于具有光学隧道效应的显微镜和/或光谱学,或者适用于通过光学微光刻工艺蚀刻纳米结构。和/或电子。

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