INSTALLATION FOR THE STUDY OR TRANSFORMATION OF SAMPLE SURFACES IN A VACUUM OR CONTROLLED ATMOSPHERE

摘要

PCT No. PCT/FR91/00378 Sec. 371 Date Jan. 5, 1993 Sec. 102(e) Date Jan. 5, 1993 PCT Filed May 7, 1991 PCT Pub. No. WO91/17429 PCT Pub. Date Nov. 14, 1991.Installation for the analysis or transformation of the surface of samples placed in a vacuum or controlled atmosphere, including a main enclosure in which is positioned a support plate for at least one device, called SXM, in which a microprobe such as a light or electricity conducting tip is positioned close to the surface of the sample to be examined, whether in the air or in a vacuum. The device is intended for the microscopy, spectroscopy or etching of the sample surface by scanning of the surface by the microprobe. The support plate is equipped with elements for disconnecting it from the main enclosure and with elements for rotating the support plate around a central axis allowing the use of a series of SXM devices fitted into the periphery of the support plate. The main enclosure is completed by a scrubbing enclosure for the surface of the samples and by an introduction and storage enclosure for the samples, which can be handled through the installation by the end of a conveyor rod that can be moved longitudinally and in axial rotation along the alignment axis of the enclosures.