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METHOD FOR PRODUCING SOLDER CONTACT HILLS AND RESULTING STRUCTURE.

机译:制备焊料接触山和结构的方法。

摘要

The invention is a method of forming a solder bump (17) on an under bump metallurgy (13) in which a contact pad (11) on a substrate material is partially covered by a passivation layer (12) upon the substrate material which is non-wettable by solder and in which the under bump metallurgy (13) covers the portions of the contact pad (11) which are not covered by the passivation layer (12) and in which the under bump metallurgy overlaps from the contact pad to cover portions of the passivation layer. The method comprises depositing a layer of solder soluble metal upon the under bump metallurgy so as to cover the under bump metallurgy with the solder soluble metal; coating the deposit of solder soluble metal with a layer of solidified solder while substantially avoiding complete dissolution of the solder soluble metal in the solder; and heating the solder until the layer of solder melts and the deposit of solder soluble metals substantially completely dissolves in the melted solder and the surface tension of the melted solder draws the solder and dissolved solder soluble metal away from the non-wettable passivation layer (12) and into a spheroid solder bump (17).
机译:本发明是一种在下凸点冶金学(13)上形成焊料凸点(17)的方法,其中衬底材料上的接触垫(11)被非衬底材料上的钝化层(12)部分覆盖。 -可通过焊料润湿,并且凸块下冶金(13)覆盖了接触垫(11)未被钝化层(12)覆盖的部分,并且凸块下冶金从接触垫重叠到覆盖部分钝化层。该方法包括在凸点下冶金上沉积焊料可溶金属层,以便用焊料可溶金属覆盖凸点下冶金。用固化的焊料层覆盖焊料可溶金属的沉积物,同时基本上避免焊料可溶金属在焊料中的完全溶解;然后加热焊料,直到焊料层熔化并且焊料可溶性金属的沉积物基本上完全溶解在熔化的焊料中,并且熔化的焊料的表面张力将焊料和溶解的焊料可溶性金属从不可润湿的钝化层中拉出(12 )并放入球形焊球(17)。

著录项

  • 公开/公告号AT113759T

    专利类型

  • 公开/公告日1994-11-15

    原文格式PDF

  • 申请/专利权人 MCNC;

    申请/专利号AT19890402181T

  • 发明设计人 DISHON GIORA J.;

    申请日1989-08-01

  • 分类号H01L21/60;H01L23/485;

  • 国家 AT

  • 入库时间 2022-08-22 04:17:20

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