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A method for plasma - chemical deposition from the vapor phase and a method for the preparation of a film of diamond-like carbon.
A method for plasma - chemical deposition from the vapor phase and a method for the preparation of a film of diamond-like carbon.
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机译:一种从气相进行等离子体化学沉积的方法,以及一种制备类金刚石碳膜的方法。
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摘要
A plasma CVD apparatus comprises a first vacuum enclosure 28 with a plasma generating means 29, an accelerating means 30 for accelerating ions in a plasma toward a substrate 31 and a second vacuum enclosure 27 connected to the first vacuum enclosure 28, so that the plasma gas flows into the second vacuum enclosure 27 and forms a film of uniform and superior quality at high speed.
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