NOVEL MICROWAVE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION EQUIPMENT FOR THE PREPARATION OF DIAMOND-LIKE CARBON FILMS

摘要

Diamond-Like Carbon (DLC) films were deposited by microwave plasma enhanced chemical vapor deposition (MPECVD) technique in a new device called star-shaped microwave plasma equipment. The surface morphology of DLC films were observed by Scanning Electron Microscope (SEM), the infrared properties of the films were observed by Fourier transform infrared spectrometer (FTIR) and the quality of the DLC films was studied by the Raman spectrometer. The results showed that the DLC films have high quality, thus indicating that the star-shape microwave plasma equipment was an efficient way to volume-produce DLC films with its uniquely large reactive cavity.