Synthesis of Diamond-Like Carbon Films Using Hot Filament-Aided Microwave Plasma Chemical Vapor Deposition

摘要

Diamond-like carbon (DLC) films have been deposited using pure CH4 generated in a surface wave plasma equipment, where a hot filament is used to make the discharge easily and provides a certain amount of heat feeding to the samples. The deposited films are charac terized by Raman spectrum, scanning electronic microscopy and infrared absorption spectrum techniques. The electron density increases with the filament current and the Raman signal is stronger and sharper with a current adding to the filament, indicating that the hot filament can improve film quality by increasing the electron density. Meanwhile, films with stronger and sharper Raman peaks around 1332 cm-1 and 1600 cm-1, denser and size-unchanging clusters, and obvious stretching mode of CH3 or CH2 under a direct current (dc) bias of -60 V are shown respectively by Raman spectrum, scanning electronic microscopy photos and infrared absorption spectrum. The content calculated by decomposition of Raman spectrum of the film is 44% under the dc bias of -60 V.``