Field effect transistor structure heavily doped source/drain regions and lightly doped source/drain regions

摘要

A field effect transistor structure includes heavily doped source/drain regions and lightly doped source/drain regions, The lightly doped source/drain regions extend form the source drain regions partway under a sidewall spacer adjacent a gate electrode. Very lightly doped source/drain regions extend the remainder of the way under the sidewall spacers to provide improved transistor characteristics.