Potential measuring method and apparatus according to the electron beam

摘要

PURPOSE:To obtain waveform data with good linearity as voltage waveform data by finding the analytic voltage of an energy filter which controls the signal quantity of secondary electrons, etc., to an expected value with respect to various kinds of timing, and coupling the analytic voltages in timing order. CONSTITUTION:An electron beam 1 is projected on wiring on an integrated circuit 2 and generated secondary electrons are detected by a detector 5 through an analytic electrode 4. Here, the voltage value of the electrode 4 is set through a calculation controller 12 and a D/A converter 8. Then a timing control circuit 9 is actuated with the trigger signal of a pattern generator 3 and measurement data is detected by the detector 5 and stored in a memory 10 in order through an amplifier 6 and an A/D converter 7. Then the controller 12 reads the data out of the memory 10 in order after the measurement, performs calculation processing, and stores the result in a waveform data memory 11. Then the respective waveforms stored in the memory 11 are sliced to obtain final waveform data, i.e. the voltage waveform at a measurement point.