ELECTRON BEAM INCIDENT ANGLE MEASURING APPARATUS, ELECTRON BEAM INCIDENT ANGLE DISTRIBUTION MEASURING APPARATUS, ELECTRON BEAM EXPOSURE APPARATUS, ELECTRON BEAM INCIDENT ANGLE MEASURING METHOD AND ELECTRON BEAM INCIDENT ANGLE DISTRIBUTION MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To prevent noise signals generated from electrons inputted to other sensors, etc. than an electron beam detecting means from influencing output signals from the electron beam detecting means for detecting an electron beam to allow accurate electron beam incident angle distribution measurement.;SOLUTION: The electron beam incident angle distribution measuring apparatus comprises an incident angle detecting means 60 for outputting an angle corresponding to the change of the incident angle of an electron beam 15, an incident angle measuring means 91 for measuring the incident angle of the electron beam 15 based on the output signal from the incident angle detecting means 60, means 92-94 for shielding the detecting means 60 from the electron beam, a means 95 for storing the output signal from the detecting means 60 shielded from the electron beam 15 by the shielding means 92-94, and a means 96 for correcting the output signal inputted to the measuring means 91 from the detecting means 60 to a difference signal between the output signal from the detecting means 60 and a signal stored in the storing means 95.;COPYRIGHT: (C)2005,JPO&NCIPI