ANALYZER OF ENERGY OF REFLECTED ELECTRONS FOR SCANNING ELECTRON MICROSCOPE

摘要

FIELD: scanning electron microscopes, non-destructive flaw detection and testing. SUBSTANCE: device has shielding housing, which has input and output apertures, and two-electrode system, which is positioned inside housing and which electrodes are in symmetry about axis. One electrode is grounded, another one is connected to high-voltage power supply. Inner grounded electrode is designed as conical frustum, which size of cross-section decreases towards object for investigation, which generatrix surface is concave and which is coaxial to electron sound of scanning electron microscope. Said inner electrode has through hole along its axis for electron sound. Outer electrode, which is connected to high-voltage power supply, is designed as cylinder, which is coaxial to electron sound. Said electrode along its axis has hole, which is shaped as conical frustum, which section decreases towards object for investigation and which side surface is concave towards axis. As result, shape of outer surface of inner electrode and inner surface of outer electrode provides channel for focusing close-to-axis part of reflected electrons to ring, which coaxial to electron sound. Said ring is positioned on opposite side of surface of analyzer housing with respect to object for investigation. Input and output apertures are designed as ring-shaped slits. EFFECT: decreased size, facilitated use, position of analyzer of reflected electrons is close to primary beam of scanning electron microscope, use of low-level voltage for analysis, indication of several deep layers of object for investigation without destruction. 1 dwg