Low-cost virtual instrumentation system of an energy-dispersive X-ray spectrometer for a scanning electron microscope

摘要

The paper describes an energy-dispersive X-ray spectrometer for a scanning electron microscope (SEM-EDXS). It was constructed using the new architecture of a virtual instrument (VI), which is low-cost, space-saving, fast and flexible way to develop the instrument. Computer-aided teaching (CAT) was used to develop the instrument and operation rather than a traditional instrument technique. The VI was designed using the object-oriented program language C++ and compact programmable logical devices (CPLD). These include spectra collection and processing, quantitative analysis and X-ray-intensity distribution analysis. The procedure is described in detail. The VI system gives an e¡ective and user-friendly human interface for the whole analytical task. Some examples are described.