ENERGY DISPERSION TYPE X-RAY DETECTION DEVICE, SCANNING ELECTRON MICROSCOPE USING THE SAME AND ELECTRON BEAM MICRO ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide an energy dispersion type X-ray detection device having excellent vibration proofness and provided with a detecting part with a high low-noise decomposition function in a low cost.;SOLUTION: An electrode 2, to which a semiconductor X-ray detection element 1 and a high-voltage wire 8 are connected via a slit opening 10, is included in an insulator 3, which is stored in an element holder 4. A finger body 6 with high thermal conductivity coupled with a cold finger 7 contains a first stage FET 11, a gate electrode 13 connected to the gate and provided on the end face, and a substrate 5 provided with a heater resistance 12 mounted thereon and a FET wiring 9 for sending and receiving signals to and from outside. By fastening a female screw of the element holder 4 and a male screw 14 of the finger body to each other, the semiconductor X-ray detection element 1 is fixed with the electrode 2 and the gate electrode 13 sandwiching it.;COPYRIGHT: (C)2002,JPO