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Reliability Test Equipment for Semiconductor Devices and Test Methods Using the Same
Reliability Test Equipment for Semiconductor Devices and Test Methods Using the Same
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机译:半导体器件的可靠性测试设备及其测试方法
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摘要
The present invention relates to a reliability test equipment of a semiconductor device and a test method using the same. In the looping sequence except for the set threshold voltage measurement time, only the program and erase stress operations are repeated, thereby minimizing the operation of the switching means, thereby improving the test speed. The present invention relates to a reliability test equipment for a semiconductor device and a test method using the same for obtaining accurate test results.
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