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Fluxless soldering esp. flip-chip bonding apparatus

机译:无助焊剂esp。倒装芯片焊接设备

摘要

In an apparatus for fluxless soldering of photonic components onto a substrate in a radiant heated, quartz glass vacuum chamber having a gas feed line, a work holder and a controller, the novelty is that (a) the vacuum chamber (2) is a flat chamber having a quartz glass plate bottom (3) and a removable quartz glass plate lid (4); (b) radiant heating is provided by a focussed IR radiant heater (5) located directly under the chamber bottom (3) and directly aligned with the substrate (6); (c) the holder consists of an external upper adjustment device (26) for holding and positioning a photonic component (esp. in the form of an IR-transparent flip-chip, 18) and an external lower substrate adjustment device (7) which does not hinder the radiant heating; and (d) the controller has an in-situ adjustment monitoring device for automatic adjustment of the flip-chip (18) on the substrate (6), the device being an IR microscope (28) which can be positioned above the chamber lid (4).
机译:在用于将光子组件无钎焊到辐射加热的石英玻璃真空室中的基板上的装置中,该石英玻璃真空室具有气体进料管线,工件支架和控制器,其新颖性在于(a)真空室(2)是扁平的腔室具有石英玻璃板底部(3)和可移动的石英玻璃板盖(4); (b)通过位于腔室底部(3)正下方并与基板(6)直接对准的聚焦红外辐射加热器(5)提供辐射加热; (c)支架包括一个用于固定和定位光子组件的外部上部调节装置(26)(特别是IR透明倒装芯片形式18)和一个外部下部基板调节装置(7),不妨碍辐射加热; (d)控制器具有用于自动调整基板(6)上的倒装芯片(18)的原位调整监视设备,该设备是可以放置在腔室盖上方的IR显微镜(28)。 4)。

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