Electrode system mfg. method using numerical control for ion beam acceleration and focussing

摘要

The method provides optimisation of an electrode system with at least one pair of electrical conductors positioned at a defined relative spacing via isolators, with a given potential difference applied across them. The ion beam characteristics are calculated by numerical simulation and the shape and configuration of the individual electrode structures is adjusted, so that a calculated function has a min. value. with conversion into a data set used for formation of the electrode structures via a numerically-controlled machine tool.