Field effect transistor with trenches with low endowed epitactical area at its surface

摘要

A DMOS field effect transistor having its gate electrode located in a trench includes a lightly doped epitaxial layer overlying the usual epitaxial layer. The trench penetrates only part way through the upper epitaxial layer which is more lightly doped than is the underlying lower epitaxial layer. The lightly doped upper epitaxial layer reduces the electric field at the bottom of the trench, thus protecting the gate oxide from breakdown during high voltage operation. Advantageously, the upper portion of the lightly doped upper epitaxial layer has little adverse effect on the transistor's on resistance. IMAGE