MQW distributed feedback laser for optical communications - has modulators coupled to optical amplifier and built on same indium phosphide substrate with number of epitaxial semiconductor layers and metal electrodes deposited on structure surface

摘要

The IC includes a laser (L) with a modulator (M1) coupled to an optical amplifier (A1) and a second modulator (M2). All four components are obtained on the same indium phosphate substrate (10) doped with N+ ions. Identical epitaxial semiconductor layers are grown on the flat surface of the substrate while a Bragg grating (12) is provided for the laser. A metal layer (26) is deposited on the lower surface of the substrate and connected to earth. A similar layer (24) is provided on the upper surface . The top layer is then etched to provide electrodes for the laser, modulators and amplifier. The etching is followed by a proton implantation.