Manner null of alignment the oblique incidence reflected die optical device and its

摘要

PURPOSE:To easily and highly accurately align an oblique-incident reflection type optical element with an optical beam by arranging plural photosensors around the reflecting surface of the optical element so that the photosensitive sections of the sensors can be set in the same plane width the reflecting surface of the optical element. CONSTITUTION:An incident slit 4, oblique-incident mirror 1, and electrodes 2 and 3 are provided in a vacuum vessel 5 and the mirror 1 is composed of a glass substrate 19 and reflecting surface 18 on which a metal is vapor-deposited. The electrodes 2 and 3 are constituted of a vapor-deposited metal electrically insulated from the reflecting surface 18 on a substrate which is commonly used as the reflecting surface 18 and when photoelectrons are discharged from the electrodes 2 and 3, the photoelectrons are read by ammeters 12 and 13. An incident beam 6 enters the device through the incident slit 4 and goes out of the device as an emitted beam 7 after the beam 6 is reflected by the mirror 1. Positions of the reflecting surface of the mirror 1 and reflecting surfaces of the electrodes 2 and 3 can be adjusted from the outside of the vacuum vessel by means of a driving mechanism 14. The position of the slit 4 can also be adjusted from the outside by means of a driving mechanism 17. Therefore, this oblique-incident reflection type optical elements can be aligned accurately with the optical beam.