ETCHING SOLUTION FOR SILVER THIN FILM AND METHOD FOR ETCHING SILVER THIN FILM

摘要

PROBLEM TO BE SOLVED: To produce an acidic etching soln. for silver thin film capable of using an alkali type etching resist, inodorous at the time of etching silver thin film and furthermore free from the generation of harmful gases and to provide a method for efficiently etching silver thin film at a low cost by using this etching soln. ;SOLUTION: This etching soln. for silver thin film is composed of an acidic aq. soln. cong. ferric sulfate as effective components. Furthermore, this method for etching silver thin film is the one in which, at the time of etching silver thin film by using the etching soln., the specific gravity of the etching soln. in an etcher 1 is measured, based on this measured result, an etching soln. having a prescribed compsn. thinner than the prescribed compsn. of the etching soln. is fed to the etcher 1, and the specific gravity is regulated to the prescribed value.;COPYRIGHT: (C)1998,JPO