机译:非晶铟镓锌氧化物薄膜的干刻蚀特性
School of Pharmaceutical Sciences, Changchun University of Chinese Medicine, Changchun 130117, China;
School of Pharmaceutical Sciences, Changchun University of Chinese Medicine, Changchun 130117, China;
School of Pharmaceutical Sciences, Changchun University of Chinese Medicine, Changchun 130117, China;
School of Pharmaceutical Sciences, Changchun University of Chinese Medicine, Changchun 130117, China;
The State Key Laboratory of Superhard Materials, Jilin University, Changchun 130112, China;
氧化物薄膜; 干蚀刻; 氧化锌; 非晶; 特性; 镓; 铟; 蚀刻工艺;