PURPOSE: To automate measurement completely so as to facilitate analyzing operation by automatically recognizing the species, position and direction of the object to be analyzed and evaluated, and automatically adjusting an electron microscope. ;CONSTITUTION: When a specimen to be measured is mounted on a specimen holder 3 and inserted, an analyzing electron microscope is automatically set in an object recognizing operation by the control of a CPU 14. First, in searches the hole in the central part of the specimen, where transmission of an electron beam becomes the maximum, and begins observation from the vicinity of the hole. Next, it automatically increases its magnification in succession, and measures the intensity distribution of the transmitted electron beam. When variation in the intensity does not exceed a predetermined value, it is regarded as the same grain boundary, and the film thickness is automatically measured by means of an energy loss spectrometer 5 so as to judge the grain boundary. Finally, elementary analysis is carried out using an energy dispersion type X-ray analyzer 4, and adjustment is performed according to the distribution state of the intensity based on the element concentration. Consequently, a highly precise analysis can be easily carried out and analyzing time can be shortened.;COPYRIGHT: (C)1994,JPO&Japio
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