method of producing a substrate of a tintenstrahlkopfes and processes for the manufacture of a tintenstrahlkopfes

摘要

A method of preparing an ink jet head comprises a support (1); an electrothermal transducer formed on said support and having a heat-generating resistor (2) and a pair of electrodes (3) connected electrically to said heat-generating resistor; and a liquid path (6) formed on said support corresponding to the heat-generating portion of said electrothermal transducer formed between said pair of electrodes, and communicating with a discharge opening for discharging liquid, which comprises the step of dry etching to pattern the material for said heat-generating resistor provided on said support in the form of a layer.