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High accuracy fabrication of X-ray masks with optical and E-beam lithography
High accuracy fabrication of X-ray masks with optical and E-beam lithography
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机译:利用光学和电子束光刻技术高精度制造X射线掩模
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摘要
X-ray lithography is used in the fabrication of very large scale integrated circuits. Optical lithography techniques are used to create a preliminary mask with coarse features in the preparation of a high resolution x-ray mask. The E-beam tool may register the location of the E- beam relative to the optically written coarse features. This helps the tool to navigate according to the location of specific features.
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