首页> 外国专利> PARTS FOR FLIP CHIP BONDING, COMPONENT FOR CONFIRMING FLIP CHIP BONDING, AND FLIP CHIP BONDING METHOD

PARTS FOR FLIP CHIP BONDING, COMPONENT FOR CONFIRMING FLIP CHIP BONDING, AND FLIP CHIP BONDING METHOD

机译:倒装芯片的零件,确认倒装芯片的组件以及倒装芯片的方法

摘要

PROBLEM TO BE SOLVED: To confirm both of bonding accuracy and electrical continuity by setting components for flip chip bonding being used for bonding to transparent glass with substrate components and chip components. SOLUTION: A substrate component 10 for confirmation and chip component 30 for confirmation use a plate-shaped member consisting of transparent glass. In the chip component 30 for confirmation, a black direction alignment mark 40 is formed in a position corresponding to a direction alignment mark 20 of the substrate component 10 for confirmation, where the mark 40 has the same shape as the direction alignment mark 20 and a slightly thinner width than that of the mark 20. Also, an X-axis measurement scale 41 and a Y-axis measurement scale 42 are formed at a position corresponding to an X-axis measurement scale 21 of the substrate component 10 for confirmation and an X-axis scale base line 23 and a Y-axis scale base line 24 of a Y-axis measurement scale 22, thus confirming both of bonding accuracy and electrical continuity.
机译:要解决的问题:通过设置倒装芯片键合组件来确定键合精度和电气连续性,该组件用于与具有衬底组件和芯片组件的透明玻璃键合。解决方案:用于确认的基板组件10和用于确认的芯片组件30使用由透明玻璃组成的板状部件。在用于确认的芯片部件30中,在与用于确认的基板部件10的方向对准标记20相对应的位置处形成黑色方向对准标记40,其中标记40具有与方向对准标记20相同的形状,并且宽度稍小于标记20的宽度。此外,在与用于确认的基板部件10的X轴测量标尺21相对应的位置处形成X轴测量标尺41和Y轴测量标尺42。 Y轴测量标尺22的X轴标尺基准线23和Y轴标尺基准线24,从而确认接合精度和电连续性两者。

著录项

  • 公开/公告号JPH11191575A

    专利类型

  • 公开/公告日1999-07-13

    原文格式PDF

  • 申请/专利权人 SHINKAWA LTD;

    申请/专利号JP19970367439

  • 发明设计人 TANAKA YUJI;

    申请日1997-12-25

  • 分类号H01L21/60;

  • 国家 JP

  • 入库时间 2022-08-22 02:37:36

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