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PARTS FOR FLIP CHIP BONDING, COMPONENT FOR CONFIRMING FLIP CHIP BONDING, AND FLIP CHIP BONDING METHOD
PARTS FOR FLIP CHIP BONDING, COMPONENT FOR CONFIRMING FLIP CHIP BONDING, AND FLIP CHIP BONDING METHOD
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机译:倒装芯片的零件,确认倒装芯片的组件以及倒装芯片的方法
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摘要
PROBLEM TO BE SOLVED: To confirm both of bonding accuracy and electrical continuity by setting components for flip chip bonding being used for bonding to transparent glass with substrate components and chip components. SOLUTION: A substrate component 10 for confirmation and chip component 30 for confirmation use a plate-shaped member consisting of transparent glass. In the chip component 30 for confirmation, a black direction alignment mark 40 is formed in a position corresponding to a direction alignment mark 20 of the substrate component 10 for confirmation, where the mark 40 has the same shape as the direction alignment mark 20 and a slightly thinner width than that of the mark 20. Also, an X-axis measurement scale 41 and a Y-axis measurement scale 42 are formed at a position corresponding to an X-axis measurement scale 21 of the substrate component 10 for confirmation and an X-axis scale base line 23 and a Y-axis scale base line 24 of a Y-axis measurement scale 22, thus confirming both of bonding accuracy and electrical continuity.
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