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SUBSTRATE FOR FLIP-CHIP BONDING AND METHOD FOR TESTING THE FLIP-CHIP BONDING

机译:倒装芯片键合的基材和倒装芯片键合的测试方法

摘要

PROBLEM TO BE SOLVED: To flip-chip bond elements highly densely, to make them compact, and to improve the accuracy of a bonding test in a semiconductor chip with staggered bump electrodes. SOLUTION: In a substrate for flip-chip bonding, in which a semiconductor chip having a plurality of staggered bumps 52 are flip-chip bonded to a plurality wirings 34 corresponding thereto, a pad 36, first and second extensions 38, 40 are formed each wiring 34. The pad 36 is staggered, such that it corresponds to bump 52 and the bump has an area and a shape, which is adequate for the flip-chip bonding. The first extension 38 is made narrower than the pad 36 to prevent an interference with the neighboring wirings. The second extension 40 has straight base sides 42, extending continuously in the width direction from the outer periphery of the pad 36.
机译:要解决的问题:在具有交错凸块电极的半导体芯片中,以高密度倒装芯片键合元件,使其紧凑,并提高键合测试的准确性。解决方案:在倒装芯片接合的基板中,具有多个交错凸块52的半导体芯片被倒装芯片接合到与其对应的多个布线34上,分别形成焊盘36,第一和第二延伸部分38、40焊盘36是交错的,使得其对应于凸块52,并且凸块具有面积和形状,这对于倒装芯片接合是足够的。使第一延伸部38比焊盘36窄,以防止与相邻配线的干扰。第二延伸部40具有从衬垫36的外周沿宽度方向连续延伸的直的基侧42。

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