Method for aligning substrate positions in a machine vision system

摘要

A method of aligning a substrate in a machine vision system of the present invention includes forming first and second holes at predetermined positions of an upper plate. Further, first and second reference marks corresponding to the respective holes are displayed at predetermined positions of the lower plate. At least one of the upper plate and the lower plate is moved so that the center coordinates of the reference marks are close to the center coordinates of the corresponding holes.