METHOD FOR ALIGNING SUBSTRATES USING MACHINE VISION SYSTEM

摘要

The substrate position alignment method according to the present invention is a method of aligning a lower plate at a predetermined position under the upper plate by a machine vision system. The method includes a forming step, a displaying step, an imaging step and an alignment step. In the forming step, the first and second holes are formed at predetermined positions of the upper plate. In the display step, first and second reference marks corresponding to the holes are displayed at predetermined positions on the lower plate. In the imaging step, the upper plate is imaged while the lower plate is moved step by step under the upper plate. In the alignment step, the center coordinates of each hole and each reference mark are obtained from the pixel coordinates of the region whose brightness is changed in the image obtained by imaging of the top plate, and the center coordinates of each reference mark are corresponding to the center coordinates of the corresponding holes. The bottom plate is aligned to be close.