Method for manufacturing a molybdenum-tip field effect electron emission display device having a triode structure

摘要

The present invention relates to a method for producing a molybdenum tip FED having a triode structure, comprising: depositing and coating a first separation layer (30) and a photoresist layer (32) on a substrate (10) Forming a metal tip (40 ') by depositing a metal layer (40) for a tip on the pattern; etching the photoresist layer (30) and the photoresist layer (32) Depositing a second isolation layer 50 for a second lift-off of the first isolation layer 30 and removing the first isolation layer 30 except for the metal tip 40 ' Etching the metal tip 40 'by dry etching to form the metal tip 40' in a cylindrical shape; depositing a gate insulating layer 60 on the specimen by vacuum deposition; , Wet-etching the second separation layer (50) after the deposition of the insulation layer (60) to remove the insulation layer on the metal tip, A step of sequentially depositing a gate electrode 70 and a third separation layer 80 on the gate insulating layer 60 while rotating the substrate 10 in an oblique direction and depositing molybdenum or other metal layer 40 Etching the third isolation layer 80 on the gate electrode 70 by wet etching to form the microtip 90 by a lift-up process, The height of the tip and the thickness of the gate insulating layer are increased to 1 or more, thereby preventing leakage current and element breakdown, and since the shape of the tip is a pentagonal shape, The structure and the stability against heat are improved.