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Method for fabricating a silicon-on-sapphire wafer
Method for fabricating a silicon-on-sapphire wafer
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机译:蓝宝石上硅晶片的制造方法
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摘要
A method for fabricating a silicon-on-sapphire wafer for processing by silicon-wafer-processing equipment. A layer is deposited on a backside of a silicon-on-sapphire wafer, the layer having optical and electrical properties of silicon, wherein the silicon-on-sapphire wafer may be sensed by a sensor designed to sense a presence of a silicon wafer.
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