PURPOSE: To improve the stability of a coating liquid, while expediting the conversion to an oxide in the heating and baking process after the film forming, in a formation of a titanic acid ferroelectric film using an organic metal compound as the raw material, in a gel-sol method, and to provide an even and fine ferroelectrics film. ;CONSTITUTION: This is a composition for forming a titanic acid ferroelectric film which consists of a compound oxide shown as the general formula: ATiO3 (where A=Ba, Sr, Ca, Mg, or Pb), or the general formula: Bi4Ti3O12. The material organic compounds of the component metals are contained in an organic solvent at the ratio corresponding to the compositions of the objective compound oxides, and furthermore, a coating liquid including a stabilizer (β-diketone, for example) and an oxidizer (hydrogen peroxide, for example) is used.;COPYRIGHT: (C)1995,JPO
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机译:用途:为了提高涂布液的稳定性,同时在成膜后以有机金属化合物为原料形成钛酸铁电膜的过程中,在成膜后的加热和烘烤过程中加速转变成氧化物。凝胶溶胶法,并提供均匀而精细的铁电薄膜。 ;组成:这是一种用于形成钛酸铁电膜的组合物,它由以下通式的复合氧化物组成:ATiO 3 Sub>(其中A = Ba,Sr,Ca,Mg或Pb) ,或通式:Bi 4 Sub> Ti 3 Sub> O 12 Sub>。构成金属的原料有机化合物以对应于目标复合氧化物的组成的比例包含在有机溶剂中,此外,包含稳定剂(例如β-二酮)和氧化剂(过氧化氢)的涂布液。 ;例如)。COPYRIGHT:(C)1995,JPO
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