Good or bad selective manner and that device null of size measurement manner and that device, and circuit substrate of circuit substrate

摘要

PURPOSE:To automatically measure the dimensions of different parts of a hybrid circuit board itself and/or dimensions of the patterns on the board quickly and precisely by selectively sensing either of a polarized image and fluorescent image. CONSTITUTION:Illumination light from a light, source 11 is passed through a filter 12 and mirror 13 and illuminates the surface of a hybrid circuit board 14 to be measured. The reflected light from the surface of this board 14 is sensed by a TV camera 16 as an image of the whole board. The obtained image data is processed by an image processing device 17, and the position of the object to be measured is calculated. Therein a control device 19 switches the filters 12, 15 and mirror 13 into a specified combination so that two types of images, i.e., polarized image and fluorescent image, are sensed one after another. According to the polarized illumination/polarizedly sensed image, the ceramic portion is sensed as a bright image. According to the fluorescent sensing system, on the other hand, fluorescence is generated in the portion where an insulative material of organic resin is exposed so that the area is sensed bright, and thus an image with good contrast can be sensed.