首页> 外国专利> II-VI LASER DIODES WITH QUANTUM WELLS GROWN BY ATOMIC LAYER EPITAXY AND MIGRATION ENHANCED EPITAXY

II-VI LASER DIODES WITH QUANTUM WELLS GROWN BY ATOMIC LAYER EPITAXY AND MIGRATION ENHANCED EPITAXY

机译:具有原子层外延和迁移增强外延生长的量子阱的II-VI激光二极管

摘要

A method for using atomic layer epitaxy (ALE) and/or migration enhanced epitaxy (MEE) to grow high efficiency quantum wells in II-VI laser diodes. The substrate and previously grown layers of the laser diode are heated to a temperature less than or equal to about 200 DEG C. in an MBE chamber. Sources of Cd, Zn, and Se are injected alternately into the chamber to grow a short-period strained-layer superlattice (SPSLS) quantum well layer including overlaying monolayers of Cd, Zn and Se. The quantum well layer is described by the notation [(CdSe)m(ZnSe)n]p where m, n and p are integers.
机译:一种使用原子层外延(ALE)和/或迁移增强外延(MEE)来生长II-VI激光二极管中的高效量子阱的方法。激光二极管的衬底和先前生长的层在MBE室中被加热到小于或等于大约200℃的温度。将Cd,Zn和Se的源交替注入腔室中,以生长包括Cd,Zn和Se的单层覆盖层的短周期应变层超晶格(SPSLS)量子阱层。量子阱层用符号[(CdSe)m(ZnSe)n] p表示,其中m,n和p为整数。

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