METHOD FOR SUPPRESSING HORIZONTAL MODE IN SBAR(SEMICONDUCTOR BULK ACOUSTIC RESONATOR)

摘要

PURPOSE: A method for suppressing horizontal mode in SBAR is provided to improve a passband insertion loss and a phase characteristic of the resonator. CONSTITUTION: The horizontal acoustic wave mode can be suppressed by using viscid acoustic damping material like polyimide while the viscid damping material absorbs relatively small amount of energy in the vertical mode along with at least one of electrodes(26,28) to change horizontal dimension of the resonator electrodes(26,28) or reduce reflection from electrode edge to electrode region in the horizontal acoustic mode.