PURPOSE: A method and an apparatus for determining a sample shape by measuring an inclination of a surface with an injection type electron microscope are provided to precisely measure an inclination of a sample surface by the injection type electron microscope to determine a three-dimensional shape of the sample. CONSTITUTION: A method for determining a sample shape by measuring an inclination of a surface with an injection type electron microscope includes the steps of obtaining a plurality of electronic emission measuring values by measuring electronic emission from a part of a surface positioned at a predetermined angle for each electronic beam(20,22), and inducing a relationship between the electronic emission and the angle on the basis of the plurality of measuring values by performing a measuring steps, facing the electron beams on a position on the surface to impact on the position for obtaining a measured electronic emission, and inducing an angle from the obtained relationship from the measured electronic emission and the obtained relationship on the position to determine an inclination of the surface(24,26,28).
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