A study of surface measuring limitation on a laser scanning microscope by the examination of response properties of surface texture and slope detection on a ruby sphere sample

摘要

A Laser Scanning Microscope (LSM) is an optical measuring instrument that is becoming widely adopted as an effective solution for surface metrology. However, measurements by optical methods may not always accurately represent minute, jagged surfaces or steep slopes. [1] This study aims to clarify the limitations imposed on LSMs by examining the response properties of surface texture as well as the largest detectable angle of slope surface. Specifically, we examined amplitude response properties for vertical measurements, which we define as the ratio: measurement result to nominal peak-valley as stated in the manufacturer's documents. For the study of slope detection, we used a precise ruby sphere sample. The results presented indicate how best to maximise the accuracy and reliability of measurements made using LSM.